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Tegal 9XX Upgrades  

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Tegal 9XX Series Etchers
Refurbished Systems
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   901
   903
   915/965
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Tegal 9XX Series Etchers
Repairs
   RF Match
   PC Boards
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Tegal 901, 903 & 915 Touch Screen

Integrated Flat Panel Display w/Touch Screen Operation

Fully Integrated flat panel display that replaces the outdated DEC terminal & keyboard

Tegal 901/903 External Flow Switch

90X External Flow Switch

Eliminates particle build-up and clogging which is a chronic problem with OEM flow switches. Able to visually verify flow and electronically adjust trip set point.   

 

   

 

 

 

 

 

 

 

Call 503-644-3222 or Email: sales@legacysemi.com

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