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Tegal 9XX Technical Data

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Products                                     
Tegal 9XX Series Etchers
Refurbished Tegal Systems
Spares
   Tegal 901
   Tegal 903
   Tegal 915
Tegal PM Kits
Tegal Upgrades
Tegal Conversion Kits
Tegal Tooling
Tegal Technical Data
Services
Tegal 9XX Series Etchers
Repairs
   Tegal RF Match
   Tegal PC Boards
Tegal Module Rebuilds
Tegal Field Service 
Tegal Traning
 

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Assembly Drawings
Chamber Lower Electrode Display Panel
901e Tegal 901e Chamber Assembly Drawing 901e Tegal 901e Lower Electrode Assembly Drawing  Table Top, Standard Tegal IFP Display Assembly Drawing

903e

Tegal 903e Non-Direct Cooled Chamber 903e Tegal 903e Lower Electrode Assembly Drawing Table Top, Upgraded Tegal IFP Display Assembly Drawing

903e

Direct Cooled

 Tegal 903e Direct Cooled Chamber     TTW, Standard Tegal IFP Display TTW Assembly Drawing
915e Tegal 915 Chamber Assembly Drawing
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Technical Information
LED Maps Block Diagrams Jumper & Switch Settings

Gas Interface PCB

(99-126-006)

 Tegal 9XX Gas PCB LED Map 9XXe Gas Tegal 9XX Gas Block Diagram 9XXe Pressure Range Switch Settings Tegal 9XX Pressure Range Switches
Spatula Interface PCB (99-247-003) Tegal 90X Indexer LED Map 9XXe Pressure-Vacuum Tegal 9XX Pressure-Vacuum Block Diagram Micro-P (DACSCAN) Jumper Settings Tegal DACSCAN Jumper Settings
Shuttle Interface PCB  (99-287-003) Tegal 90X Shuttle LED Map 9XXe RF Control Tegal 9XX RF Block Diagram 9XXe Memory-Baud Expansion PCB Jumper & Switch Settings Tegal Memory Expansion PCB Switch Settings
Backfill Times Partial Pressures Endpoint
900/901/901e Tegal 901 Backfill Times 900/901/901e Tegal 901 Partial Pressures Endpoint Filter Specifications Tegal Endpoint Filter Specifications
903/903e Tegal 903 Backfill Times 903/903e Tegal 903 Partial Pressures

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