| Products |
| Tegal® 9XX Series Etchers |
| Refurbished Systems |
| Spares |
| 901 |
| 903 |
| 915/965 |
| PM Kits |
| Upgrades |
| Conversion Kits |
| Tooling |
| Technical Data |
| Services |
| Tegal® 9XX Series Etchers |
| Repairs |
| RF Match |
| PC Boards |
| Module Rebuilds |
| Field Service |
| Training |
|
|
38-023-001
TUBE COOLING CHAMBER
→ Drawing
→ Related Parts
|
39-926-001 ELECTRODE TOP COOLED |
80-200-366 CLAMP WORM GEAR |
|
 |
 |
Call 503-644-3222 or Email: sales@legacysemi.com
For More Information
| ©2015 Legacy Semiconductor | Privacy Policy |