Profacture Receives Order For a Complete

Tegal® 903e Chamber and Chuck Assembly

Beaverton, OR, April 23, 2003 -- Profacture Corporation, today announced that they received an order for a complete Tegal® 903e Chamber & Chuck assembly. This order comes from a leading ASIC’s manufacturer in Europe.

These modules will be used to convert one of the customers' existing 901e systems to a 903e enabling them to run a pad etch process.
 

These modules will be built with all new parts re-engineered and manufactured by Profacture.

The modules are the latest versions developed for the Tegal® 903e systems. The chamber is a "Direct Cooled" model with the recently updated Solid Ground Ring Assembly which eliminates the mesh material. 

About Profacture
Profacture Corporation, headquartered in Beaverton, Oregon, is a leading designer, re-manufacturer and supplier of components, and integrated electromechanical assemblies for Tegal 9XX series etchers. More information is available on the Internet at www.profacture.com.

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